Microbeam analysis. Electron probe microanalysis. Quantitative point analysis for bulk specimens using wavelength dispersive X-ray spectroscopy
微束分析 电子探针微量分析 用波长色散X射线光谱法对块状样品进行定量点分析
BS ISO 22489:2016 specifies requirements for the quantification of elements in a micrometresized
volume of a specimen identified through analysis of the X-rays generated by an electron beam
using a wavelength dispersive spectrometer (WDS) fitted either to an electron probe microanalyser or
to a scanning electron microscope (SEM).This International Standard also describes the following:the principle of the quantitative analysis;the general coverage of this technique in terms of elements, mass fractions and reference specimens;the general requirements for the instrument;the fundamental procedures involved such as specimen preparation, selection of experimental
conditions, the measurements, the analysis of these and the report.This International Standard is intended for the quantitative analysis of a flat and homogeneous bulk
specimen using a normal incidence beam. It does not specify detailed requirements for either the
instruments or the data reduction software. Operators should obtain information such as installation
conditions, detailed procedures for operation and specification of the instrument from the makers of
any products used.Cross References:ISO 14594ISO 14595ISO/IEC 17025:2005ISO 17470ISO 22309:2006ISO 23833All current amendments available at time of purchase are included with the purchase of this document.