Vapour vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
蒸汽真空泵——性能特性测量Spart 1:体积流量(泵速)测量
发布日期:
1993-11-25
测量涉及扩散泵、喷射泵和增压泵,即能够在分子流和层流区域运行的泵。
The measurements deal with diffusion pumps, ejector pumps, and booster pumps, i.e. pumps capable of operation in both the molecular and laminar flow regions.