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2016-08-29

硅基MEMS制造技术 基于SOI硅片的MEMS工艺规范
Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process

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硅基MEMS制造技术 体硅溶片工艺规范
Silicon-based MEMS fabrication technology - Specification for the dissolved wafer process

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硅基MEMS制造技术 体硅压阻加工工艺规范
Silicon-based MEMS fabrication technology—Specification for criterion of the bulk silicon piezoresistance process

2016-08-29