现行

BS ISO 21360-4-2018

Vacuum technology. Standard methods for measuring vacuum-pump performance-Turbomolecular vacuum pumps
真空技术 测量真空泵性能的标准方法

2018-08-23

现行

BS ISO 21360-2-2020

Vacuum technology. Standard methods for measuring vacuum-pump performance-Positive displacement vacuum pumps
真空技术 测量真空泵性能的标准方法

2020-06-17

现行

ISO 21360-4-2018

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
真空技术 - 测量真空泵性能的标准方法 - 第4部分:涡轮分子真空泵

2018-07-31

现行

ISO 21360-6-2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps
真空技术测量真空泵性能的标准方法第6部分:低温真空泵

2023-12-06

现行

BS ISO 21360-1-2020

Vacuum technology. Standard methods for measuring vacuum-pump performance-General description
真空技术 测量真空泵性能的标准方法

2020-06-17

现行

BS ISO 21360-3-2019

Vacuum technology. Standard methods for measuring vacuum pump performance-Specific parameters for mechanical booster vacuum pumps
真空技术 测量真空泵性能的标准方法

2019-02-01

现行

GB/T 40344.2-2021

真空技术 真空泵性能测量标准方法 第2部分：容积真空泵
Vacuum technology—Standard methods for measuring vacuum-pump performance— Part 2：Positive displacement vacuum pumps

2021-08-20

现行

ISO 21360-2-2020

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
真空技术 - 测量真空泵性能的标准方法 - 第2部分:容积式真空泵

2020-06-15

现行

BS 05/30133137 DC

ISO 21360. Vacuum technology. Standard methods for measuring vacuum-pump performance. General description
ISO 21360 真空技术 测量真空泵性能的标准方法 概述

2005-05-03

现行

GB/T 40344.1-2021

真空技术 真空泵性能测量标准方法 第1部分：总体要求
Vacuum technology—Standard methods for measuring vacuum-pump performance—Part 1：General description

2021-08-20

现行

ISO 21360-1-2020

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
真空技术 - 测量真空泵性能的标准方法 - 第1部分:一般描述

2020-06-15

现行

GB/T 40344.3-2024

真空技术 真空泵性能测量标准方法 第3部分：机械增压泵的特定参数
Vacuum technology—Standard methods for measuring vacuum pump performance—Part 3: Specific parameters for mechanical booster vacuum pumps

2024-04-25

现行

ISO 21360-5-2023

Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 5: Non-evaporable getter (NEG) vacuum pumps
真空技术测量真空泵性能的标准方法第5部分:非蒸发吸气剂（NEG）真空泵

2023-11-28

现行

ISO 21360-3-2019

Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
真空技术.真空泵性能测量的标准方法.第3部分:机械增压真空泵的特殊参数

2019-01-30

现行

DIN 28417

Vacuum technology; measurement of throughput by the volumetric method at constant pressure
真空技术；在恒定压力下用容积法测量吞吐量

1976-03-01

现行

DIN ISO 21360-1

Vacuum technology - Standard methods for measuring vacuum-pump performance - Part 1: General description (ISO 21360-1:2012)
真空技术.测量真空泵性能的标准方法.第1部分:一般说明（ISO 21360-1-2012）

2016-09-01

现行

GOST R 53177-2008

Вакуумная техника. Определение характеристик масс-спектрометрического метода контроля герметичности
真空技术 测量质谱仪性能特点的紧密度控制方法

现行

GB/T 28277-2012

硅基MEMS制造技术 微键合区剪切和拉压强度检测方法
Silicon-based MEMS fabrication technology - Measurement method of cutting and pull-press strength of micro bonding area

2012-05-11

现行

BS EN 62047-25-2016

Semiconductor devices. Micro-electromechanical devices-Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area
半导体器件 微机电设备

2016-11-30

现行

IEC 62047-25-2016

Semiconductor devices - Micro-electromechanical devices - Part 25: Silicon based MEMS fabrication technology - Measurement method of pull-press and shearing strength of micro bonding area
半导体器件 - 微机电器件 - 第25部分:硅基存储器制造技术 - 微接合区域的拉压和剪切强度测量方法

2016-08-29