本文件旨在让用户定期评估X射线光电子能谱仪的几个关键参数。其目的不是提供详尽的性能检查，而是提供一组可以频繁进行的快速测试。 本文件涵盖的仪器性能方面包括真空、导电或非导电试样的光谱测量以及X射线源的当前状态。仪器性能的其他重要方面（例如横向分辨率）不在本文件范围内。 本文件适用于配有单色Al KαX射线源或非单色Al或Mg KαX射线源的商用X射线光电子能谱仪。

This document is designed to allow the user to assess, on a regular basis, several key parameters of an X？ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but instead provides a rapid set of tests that can be conducted frequently. Aspects of instrument behaviour covered by this document include the vacuum, measurements of spectra of conductive or non-conductive test specimens and the current state of the X？ray source. Other important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this document. The document is intended for use with commercial X？ray photoelectron spectrometers equipped with a monochromated Al Kα X？ray source or with an unmonochromated Al or Mg Kα X？ray source.