晶片正面系列字母数字标志规范
Specification for serial alphanumeric marking of the front surface of wafers

2014-10-14

硅单晶抛光试验片规范
Specification for polished test silicon wafers

2011-01-10

太阳能电池用硅片表面粗糙度及切割线痕测试方法
Test methods for surface roughness and saw mark of silicon wafers for solar cells

2014-07-24

碳化硅单晶抛光片规范
Specification for polished monocrystalline silicon carbide wafers

2015-04-30

硅片订货单格式输入规范
Specification for order entry format of silicon wafers

2015-12-10

PVTSiC76SI1-BP01型碳化硅单晶抛光片规范
Specification for polished mono-crystalline silicon carbide wafers of PVTSiC76SI1-BP01

2016-01-19

硅基MEMS制造技术 体硅溶片工艺规范
Silicon-based MEMS fabrication technology - Specification for the dissolved wafer process

2012-05-11

军用CMOS电路用抗幅射硅单晶片规范
Specification for radiation hardened monocrystal silicon wafers for millitary CMOS integrated circuits

1999-11-10

SiC-HPSI 型高纯半绝缘碳化硅单晶片规范
Specification for high purity semi-insulating silicon carbide monocrystalline wafers of SiC-HPSI

2018-01-18

电力系统高压功率器件用碳化硅外延片使用条件
Acceptance specification for silicon carbide epitaxial wafer of high voltage power devices in the grid system

2021-04-26

硅基MEMS制造技术 基于SOI硅片的MEMS工艺规范
Silicon-based MEMS fabrication technology—Specification for criterion of the SOI wafer based MEMS process

2016-08-29