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现行 GB/T 16596-2019
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确定晶片坐标系规范 Specification for establishing a wafer coordinate system
发布日期: 2019-03-25
实施日期: 2020-02-01
本标准规定了使用直角坐标和极坐标建立晶片正面坐标系、背面坐标系和三维坐标系的程序。 本标准适用于有图形和无图形的晶片坐标系的建立。该坐标系用于确定和记录晶片上的缺陷、颗粒等测试结果的准确位置
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