洁净室的历史完全是现代的。它的增长与精密制造业的发展以及对污染如何降低产量和降低产品性能的理解是平行的。测量空气、液体、表面和化学污染物的起搏技术创造了污染控制技术及其服务行业的“蛙跳式”发展。本文重点介绍了一些关键因素和事件，这些因素和事件将我们带到了目前的状态。本文也对这一点进行了描述，并对该行业的未来做出了一些预测。单位:I-PCITION:研讨会，ASHRAE交易，1986年，第卷。 第92页。1B，旧金山

The history of clean rooms is strictly modern. Its growth parallels the development of precision manufacturing industry and the understanding of how contamination reduces yields and degrades performance of product. Pacing technology in measuring airborne, liquid borne, surface, and chemical contaminants created a "leap-frog" type of progression with contamination control technology and the industries they both serve. This paper highlights a few of the key factors and events that have brought us to the current status. This, also, is described and some projections are made as to what the future of the industry might be.Units: I-P