Safety of machinery - Electrical equipment of machines - Part 33: Requirements for semiconductor fabrication equipment (IEC 60204-33:2009, modified); German version EN 60204-33:2011
机械安全.机械电气设备.第33部分:半导体制造设备的要求(IEC 60204-33-2009 修改);德文版EN 60204-33:2011