Surface chemical analysis — Auger electron spectroscopy — Reporting of methods used for charge control and charge correction
表面化学分析——俄歇电子能谱;报告用于充电控制和充电校正的方法
发布日期:
2010-02-05
ISO 29081:2010规定了通过电子刺激俄歇电子能谱测量绝缘试样俄歇电子跃迁时描述电荷控制方法所需的最小信息量,并与分析结果一起报告。附录A中提供了AES分析之前或期间对电荷控制有用的方法的信息。本附录还包含一个表格,按方法的简单性排序,总结了各种方法。一些方法适用于大多数仪器,其他方法需要特殊硬件,其他方法可能涉及重新安装或更换试样。X射线光电子能谱(ISO 19318)也发布了类似的国际标准。
ISO 29081:2010 specifies the minimum amount of information required for describing the methods of charge control in measurements of Auger electron transitions from insulating specimens by electron-stimulated Auger electron spectroscopy and to be reported with the analytical results. Information is provided in Annex A on methods that have been found useful for charge control prior to or during AES analysis. This annex also contains a table summarizing the methods or approaches, ordered by simplicity of approach. Some methods will be applicable to most instruments, others require special hardware, others might involve remounting the specimen or changing it. A similar International Standard has been published for X?ray photoelectron spectroscopy (ISO 19318).