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硅外延层和扩散层厚度测定磨角染色法 Test method for thickness of epitaxial layers and diffused layers by angle lap stain
发布日期: 2015-04-30
实施日期: 2015-10-01
本标准适用于外延层和扩散层与衬底导电类型不同或两层电阻率相差至少一个数量级的任意电阻率的硅外延层和扩散层厚度的测量,测量范围:1μm~100μm
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