本文件定义了表征能量色散X射线光谱仪的最重要的量，该光谱仪由半导体探测器、前置放大器和信号处理单元组成，作为基本部件。本文件仅适用于带半导体探测器的光谱仪，其工作原理为固态电离。本文件规定了扫描电子显微镜（SEM）或电子探针微分析仪（EPMA）所附光谱仪的最低要求以及相关仪器性能参数的检查方法。ISO 22309[2]和ASTM E1508[3]概述了实际分析所用的程序，不在本文件的范围内。购买本文件时可获得的所有当前修订均包含在购买本文件中。

This document defines the most important quantities that characterize an energy-dispersive X-ray spectrometer consisting of a semiconductor detector, a pre-amplifier and a signal-processing unit as the essential parts. This document is only applicable to spectrometers with semiconductor detectors operating on the principle of solid-state ionization. This document specifies minimum requirements and how relevant instrumental performance parameters are to be checked for such spectrometers attached to a scanning electron microscope (SEM) or an electron probe microanalyser (EPMA). The procedure used for the actual analysis is outlined in ISO 22309[2]and ASTM E1508[3]and is outside the scope of this document.All current amendments available at time of purchase are included with the purchase of this document.