现行

GB/T 29468-2012

洁净室及相关受控环境 围护结构夹芯板应用技术指南
Cleanroom and associated controlled environments - Guidelines of partition sandwich panel application technology

2012-12-31

现行

FZ/T 64056-2015

洁净室用擦拭布
Cleanroom wiper

2015-07-14

现行

FM Approvals 4911

Wafer Carriers for Use in Cleanrooms
洁净室用晶圆载体

2010-04-01

现行

GB/T 24461-2023

洁净室用灯具技术要求
Technical requirements for luminaries used for cleanroom

2023-12-28

现行

IEST RP-CC020.2

Substrates & Forms for Documentation in Cleanrooms
洁净室文件用基材和表格

2002-11-01

现行

T/SICCA 017-2023

洁净室及相关受控环境用夹芯洁净板

2023-05-05

现行

SME MS900680

Design Criterion Of End Effectors For Clean Room Application
洁净室用末端执行器的设计准则

1990-06-01

现行

T/CBMCA046-2023

洁净室用装配式隔墙及吊顶系统技术要求

现行

T/CBMCA 046-2023

洁净室用装配式隔墙及吊顶系统技术要求

2023-10-16

现行

GOST R ISO 14644-12-2020

Чистые помещения и связанные с ними контролируемые среды. Часть 12. Требования к текущему контролю чистоты воздуха по концентрации частиц с размерами в нанодиапазоне
洁净室和相关的受控环境 第12部分 用纳米颗粒浓度监测空气清洁度的规范通过颗粒浓度与空气清洁度有关的洁净室性能的证据

现行

ASTM E1731-11(2018)

Standard Test Method for Gravimetric Determination of Nonvolatile Residue from Cleanroom Gloves
用重量法测定洁净室手套中不挥发残留物的标准试验方法

2018-11-01

现行

ASTM F91-06(2019)

Standard Practice for Testing for Leaks in the Filters Associated With Laminar Flow Clean Rooms and Clean Work Stations by Use of a Condensation Nuclei Detector
用冷凝核探测器测试层流洁净室和洁净工作站相关过滤器泄漏的标准实施规程

2019-07-01

现行

ISO 14644-8-2022

Cleanrooms and associated controlled environments — Part 8: Assessment of air cleanliness by chemical concentration (ACC)
洁净室和相关受控环境.第8部分:用化学浓度（ACC）评估空气清洁度

2022-06-21

现行

ANSI/IEST/ISO 14644-12

Cleanrooms and associated controlled environments - Part 12: Specifications for monitoring air cleanliness by nanoscale particle concentration
洁净室和相关受控环境.第12部分:用纳米颗粒浓度监测空气清洁度的规范

2018-08-01

现行

ASTM E2088-06(2021)

Standard Practice for Selecting, Preparing, Exposing, and Analyzing Witness Surfaces for Measuring Particle Deposition in Cleanrooms and Associated Controlled Environments
洁净室和相关受控环境中测量颗粒沉积用见证表面的选择、制备、暴露和分析的标准实施规程

2021-09-01

现行

KS I ISO 14644-12

클린룸 및 제어된 환경 — 제12부: 나노스케일 입자 농도에 따른 공기 청정도 모니터링을 위한 요구사항
洁净室和相关的受控环境.第12部分:用纳米级颗粒浓度监测空气清洁度的规范

2020-08-27

现行

KS I ISO 14644-15

클린룸 및 제어된 환경 — 제15부: 공기 중 화학물질 농도에 따른 사용 장비 및 자재 적합성 평가
洁净室和相关的受控环境.第15部分:用空气中的化学浓度评估设备和材料的适用性

2019-06-13

现行

AS 1807.8-2000

Cleanrooms, workstations, safety cabinets and pharmaceutical isolators - Methods of test, Method 8: Particle counting in work zone by automatic particle counter
洁净室、工作站、安全柜和药品隔离器.试验方法 方法8:用自动颗粒计数器在工作区进行颗粒计数

2000-02-15

现行

DIN EN ISO 14644-12-DRAFT

Draft Document - Cleanrooms and associated controlled environments - Part 12: Classification of air cleanliness by nanoscale particle concentration (ISO/DIS 14644-12:2013); German version prEN ISO 14644-12:2013
文件草稿.洁净室和相关受控环境.第12部分:用纳米颗粒浓度对空气清洁度进行分类（ISO/DIS 14644-12-2013）；德文版prEN ISO 14644-12:2013

2013-04-01