硅片表面金属沾污的全反射X光荧光光谱测试方法
Test method for measuring surface metal contamination on silicon wafers by total reflection X-Ray fluorescence spectroscopy

2015-12-10

蓝宝石抛光衬底片表面残留金属元素测量方法
Measurement method for surface metal contamination on sapphire polished substrate wafer

2017-10-14

硅片平坦表面的表面粗糙度测量方法
Test method for measuring surface roughness on planar surfaces of silicon wafer

2013-05-09

热解吸气相色谱法测定硅片表面的有机污染物
Test methods for analyzing organic contaminants on silicon wafer surfaces by thermal desorption gas chromatography

2009-10-30

碳化硅单晶抛光片表面粗糙度的测试方法
Test methods for measuring surface roughness of polished monocrystalline silicon carbide wafers

2015-04-30

酸浸取 原子吸收光谱法测定多晶硅表面金属污染物
Test method for measuring surface metal contamination of polycrystalline silicon by acid extraction-atomic absorption spectroscopy

2009-10-30

硅片表面金属元素含量的测定 电感耦合等离子体质谱法
Test method for the content of surface metal elements on silicon wafers—Inductively coupled plasma mass spectrometry

2020-10-11

光伏电池用硅材料表面金属杂质含量的电感耦合等离子体质谱测量方法
Test method for measuring surface metallic contamination of silicon materials used for photovoltaic applications by inductively coupled plasma mass spectrometry

2013-11-12

多晶硅表面金属杂质含量测定 酸浸取-电感耦合等离子体质谱法
Test method for measuring surface metal impurity content of polycrystalline silicon—Acid extraction-inductively coupled plasma mass spectrometry method

2023-08-06