BS IEC 62899-301-2:2017 defines measurement terms and methods related to the critical
dimension of features and the registration accuracy of features on rigid plate masters.General critical dimensions are defined to evaluate the shape accuracy of features on the
plate master. To evaluate the registration accuracy of features on the plate master, the
specification for the registration mark for the plate master is specified. Then, common
metrology procedures to measure the critical dimensions and the registration accuracy of the
plate master are established for device manufacturers, printing master manufacturers and
printing master manufacturing equipment vendors. The measurement terms which are
measured by agreement between the user and the supplier are measured using the
measurement methods given in this document.Cross References:SEMI P24-94SEMI P30-0997SEMI P18-92SEMI P19-92SEMI P35-1106SEMI P28-96SEMI P21-92SEMI P6-88SEMI P48-1110SEMI D21-0706SEMI P43-0304SEMI P36-1108SEMI P47-0307ISO 1:2002 Ed 2All current amendments available at time of purchase are included with the purchase of this document.