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现行 BS IEC 62899-301-2:2017
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Printed electronics-Equipment. Contact printing. Rigid master. Measurement method of plate master pattern dimension 印刷电子产品
发布日期: 2017-11-16
BS IEC 62899-301-2:2017定义了与临界温度相关的测量术语和方法 特征尺寸和刚性版母版上特征的配准精度。定义了一般临界尺寸,以评估表面特征的形状精度 盘子主人。为了评估印版母版上特征的配准精度 规定了版母版的注册标志规范。那么,普通 测量关键尺寸的计量程序,以及 印版母版是为设备制造商、印刷母版制造商和 印刷主生产设备供应商。测量术语如下: 根据用户和供应商之间的协议进行测量,使用 本文件中给出的测量方法。 交叉引用:SEMI P24-94SEMI P30-0997SEMI P18-92SEMI P19-92SEMI P35-1106SEMI P28-96SEMI P21-92SEMI P6-88SEMI P48-1110SEMI D21-0706SEMI P43-0304SEMI P36-1108SEMI P47-0307ISO 1:2002 Ed 2购买本文件时提供的所有当前修订版均包含在购买本文件中。
BS IEC 62899-301-2:2017 defines measurement terms and methods related to the critical dimension of features and the registration accuracy of features on rigid plate masters.General critical dimensions are defined to evaluate the shape accuracy of features on the plate master. To evaluate the registration accuracy of features on the plate master, the specification for the registration mark for the plate master is specified. Then, common metrology procedures to measure the critical dimensions and the registration accuracy of the plate master are established for device manufacturers, printing master manufacturers and printing master manufacturing equipment vendors. The measurement terms which are measured by agreement between the user and the supplier are measured using the measurement methods given in this document.Cross References:SEMI P24-94SEMI P30-0997SEMI P18-92SEMI P19-92SEMI P35-1106SEMI P28-96SEMI P21-92SEMI P6-88SEMI P48-1110SEMI D21-0706SEMI P43-0304SEMI P36-1108SEMI P47-0307ISO 1:2002 Ed 2All current amendments available at time of purchase are included with the purchase of this document.
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发布单位或类别: 英国-英国标准学会
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