BS IEC 62899-301-1:2017定义了与外部环境相关的测量术语和方法 刚性版母版的尺寸。测量术语包括几何尺寸，如边缘长度、边缘垂直度、边缘 板母基板的平直度和厚度、平整度以及表面粗糙度 盘子主人。交叉引用:ASTM D7127-13ASTM F1438-93（2012）ISO 1:2016SEMI P1-0708SEMI D7-94SEMI D24-0200 SEMI D26-1000SEMI D15-1296购买本文件时可用的所有现行修订版均包含在购买本文件中。

BS IEC 62899-301-1:2017 defines measurement terms and methods related to the external dimension of a rigid plate master.Measurement terms include geometrical size such as edge length, edge squareness, edge straightness and thickness, flatness of plate master substrates, and surface roughness of plate master.Cross References:ASTM D7127 - 13ASTM F1438 - 93(2012)ISO 1:2016SEMI P1-0708SEMI D7-94SEMI D24-0200SEMI D26-1000SEMI D15-1296All current amendments available at time of purchase are included with the purchase of this document.