IEC 60747-14-3:20 09规定了测量绝对压力、表压或差压的半导体压力传感器的要求。与上一版相比,主要的技术变更是增加了新的第5.9款(线性度的测量方法)。
本出版物应与IE C 60747-1:20 06一起阅读。
IEC 60747-14-3:2009 specifies requirements for semiconductor pressure sensors measuring absolute, gauge or differential pressures. The major technical change with regard to the previous edition is the addition of a new subclause 5.9 (measuring method of linearity).
This publication should be read in conjunction with IE C 60747-1:2006.