现行

GB/T 42597-2023

微机电系统（MEMS）技术 陀螺仪
Micro-electromechanical systems technology—Gyroscopes

2023-05-23

现行

GB/T 26111-2023

微机电系统（MEMS）技术 术语
Micro-electromechanical system technology—Terms

2023-05-23

现行

GB/T 26113-2010

Micro electromechanical system technology—General rules for the assessment of microgeometrical parameters

现行

GB/T 26112-2010

微机电系统（MEMS）技术 微机械量评定总则
Micro-electromechanical system technology - General rules for the assessment of micro-mechanical parameters

2011-01-10

现行

GB/T 26113-2010

微机电系统（MEMS）技术 微几何量评定总则
Micro-electromechanical system technology - General rules for the assessment of micro-geometrical parameters

2011-01-10

现行

BS EN 62047-11-2013

Semiconductor devices. Micro-electromechanical devices-Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
半导体器件 微机电设备

2013-10-31

现行

GB/T 42158-2023

微机电系统（MEMS）技术 微沟槽和棱锥式针结构的描述和测量方法
Micro-electromechanical systems technology（MEMS） —Description and measurement methods for micro trench and pyramidal needle structures

2023-03-17

现行

IEC 62047-11-2013

Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems
半导体器件 - 微机电器件 - 第11部分:用于微机电系统的自由立体材料的线性热膨胀系数的测试方法

2013-07-17

现行

GB/T 38341-2019

微机电系统(MEMS)技术　MEMS器件的可靠性综合环境试验方法
Micro-electromechanical system technology—The reliability test methods of MEMS in integrated environments

2019-12-31

现行

GB/T 44529-2024

微机电系统（MEMS）技术 射频MEMS环行器和隔离器
Micro-electromechanical systems（MEMS）technology—Radio frequency MEMS circulators and isolators

2024-09-29

现行

GB/T 44842-2024

微机电系统（MEMS）技术 薄膜材料的弯曲试验方法
Micro-electromechanical systems （MEMS） technology—Bend testing methods of thin film materials

2024-10-26

现行

IEC 60050-523-2018/AMD1-2019

Amendment 1 - International Electrotechnical Vocabulary (IEV) - Part 523: Micro-electromechanical systems (MEMS)
修改件1.国际电工词汇（IEV）.第523部分:微机电系统（MEMS）

2019-10-17

现行

GB/T 38446-2020

微机电系统（MEMS）技术 带状薄膜抗拉性能的试验方法
Micro-electromechanical system technology—Test methods for tensile property measurement of strip thin films

2020-03-06

现行

GB/T 42896-2023

微机电系统（MEMS）技术 硅基MEMS纳尺度结构冲击试验方法
Micro-electromechanical systems（MEMS） technology—Impact test method for nanostructures of silicon based MEMS

2023-08-06

现行

GB/T 38447-2020

微机电系统（MEMS）技术 MEMS结构共振疲劳试验方法
Micro-electromechanical system technology—Fatigue testing method of MEMS structure using resonant vibration

2020-03-06

现行

GB/T 34898-2017

微机电系统（MEMS）技术 MEMS谐振敏感元件非线性振动测试方法
Micro electromechanical system technology—Test method for the nonlinear vibration of the MEMS resonant sensitive element

2017-11-01

现行

GB/T 34899-2017

微机电系统（MEMS）技术 基于拉曼光谱法的微结构表面应力测试方法
Micro-electromechanical system technology—Measuring method of microstructure surface stress based on Raman spectroscopy

2017-11-01

现行

GB/T 42895-2023

微机电系统（MEMS）技术 硅基MEMS微结构弯曲强度试验方法
Micro-electromechanical systems（MEMS）technology—Bending strength test method for microstructures of silicon based MEMS

2023-08-06

现行

GB/T 41852-2022

半导体器件 微机电器件 MEMS结构黏结强度的弯曲和剪切试验方法
Semiconductor devices—Micro-electromechanical devices—Bend-and shear-type test methods of measuring adhesive strength for MEMS structures

2022-10-12

现行

BS EN 62047-13-2012

Semiconductor devices. Micro-electromechanical devices-Bend-and shear-type test methods of measuring adhesive strength for MEMS structures
半导体器件 微机电设备

2012-05-31