现行

GB/T 43885-2024

碳化硅外延片
Silicon carbide epitaxial wafers

2024-04-25

现行

GB/T 35310-2017

200mm硅外延片
200mm silicon epitaxial wafer

2017-12-29

现行

GB/T 14015-1992

硅-蓝宝石外延片
Silicon on sapphire epitaxial wafers

1992-12-28

现行

SJ 3242-1989

砷化镓外延片
Gallium arsenide epitaxy wafers

1989-03-20

现行

SJ/T 11470-2014

发光二极管外延片
Epitaxial wafers of light-emitting diodes

2014-10-14

现行

GB/T 42902-2023

碳化硅外延片表面缺陷的测试 激光散射法
Test method for surface defects on silicon carbide epitaxial wafers—Laser scattering method

2023-08-06

现行

DL/T 2310-2021

电力系统高压功率器件用碳化硅外延片使用条件
Acceptance specification for silicon carbide epitaxial wafer of high voltage power devices in the grid system

2021-04-26

现行

SJ/T 11471-2014

发光二极管外延片测试方法
Measurement methods for epitaxial wafers of light-emitting diodes

2014-10-14

现行

GB/T 30652-2023

硅外延用三氯氢硅
Trichlorosilane for silicon epitaxial

2023-08-06

现行

GB/T 35308-2017

太阳能电池用锗基Ⅲ-Ⅴ族化合物外延片
Epitaxial wafers of germanium based Ⅲ-Ⅴcompounds for solar cell

2017-12-29

现行

GB/T 37053-2018

氮化镓外延片及衬底片通用规范
General specification for epitaxial wafers and substrates based on gallium nitride

2018-12-28

现行

GB/T 12965-2018

硅单晶切割片和研磨片
Monocrystalline silicon as cut wafers and lapped wafers

2018-09-17

现行

SME MS900134

Silicon Wafer Reprocessing
硅片再加工

1990-06-01

现行

YS/T 28-2015

硅片包装
Package of silicon wafers

2015-04-30

现行

YS/T 985-2014

硅抛光回收片
Polished reclaimed silicon wafers

2014-10-14

现行

GB/T 26069-2022

硅单晶退火片
Annealed monocrystalline silicon wafers

2022-03-09

现行

GB/T 12964-2018

硅单晶抛光片
Monocrystalline silicon polished wafers

2018-09-17

现行

YS/T 1167-2016

硅单晶腐蚀片
Monocrystalline silicon etched wafers

2016-07-11

现行

GB/T 29506-2013

300mm 硅单晶抛光片
300mm polished monocrystalline silicon wafers

2013-05-09

现行

GB/T 34479-2017

硅片字母数字标志规范
Specification for alphanumeric marking of silicon wafers

2017-10-14