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已修订 IEC TS 62607-6-4:2016
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Nanomanufacturing - Key control characteristics - Part 6-4: Graphene - Surface conductance measurement using resonant cavity 纳米制造关键控制特性第6-4部分:石墨烯谐振腔表面电导测量
发布日期: 2016-09-28
IEC TS 62607-6-4:2016(E)建立了一种测定二维(2D)单层或多层原子薄纳米碳石墨烯结构表面电导的方法。它们是通过化学气相沉积(CVD)、在碳化硅(SiC)上外延生长、从还原的氧化石墨烯(rGO)或从石墨中机械剥离而成。测量是在充气标准R100矩形波导结构中,在一种谐振频率模式下进行的,通常为7 GHz。通过谐振腔测量表面电导涉及监测谐振频率偏移,以及样品插入谐振腔前后品质因数的变化,并与样品表面积定量相关。这种测量并不明确取决于纳米碳层的厚度。不需要知道试样的厚度,但假定横向尺寸在试样区域上是均匀的。
IEC TS 62607-6-4:2016(E) establishes a method for determining the surface conductance of two-dimensional (2D) single-layer or multi-layer atomically thin nano-carbon graphene structures. These are synthesized by chemical vapour deposition (CVD), epitaxial growth on silicon carbide (SiC), obtained from reduced graphene oxide (rGO) or mechanically exfoliated from graphite. The measurements are made in an air filled standard R100 rectangular waveguide configuration, at one of the resonant frequency modes, typically at 7 GHz. Surface conductance measurement by resonant cavity involves monitoring the resonant frequency shift and change in the quality factor before and after insertion of the specimen into the cavity in a quantitative correlation with the specimen surface area. This measurement does not explicitly depend on the thickness of the nano-carbon layer. The thickness of the specimen does not need to be known, but it is assumed that the lateral dimension is uniform over the specimen area.
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归口单位: TC 113
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