IEC 62047-36:2019（E）规定了在温度和湿度环境应力以及电应力下评估MEMS压电薄膜材料耐久性的试验方法，以及适当质量评估的试验条件。具体而言，本文件规定了在温度、湿度条件和外加电压下测量DUT耐久性的试验方法和试验条件。它还适用于评估主要在硅衬底上形成的压电薄膜（即用作致动器的压电薄膜）的逆压电性能。本文件不包括可靠性评估，例如基于威布尔分布预测压电薄膜寿命的方法。

IEC 62047-36:2019 (E) specifies test methods for evaluating the durability of MEMS piezoelectric thin film materials under the environmental stress of temperature and humidity and under electrical stress, and test conditions for appropriate quality assessment. Specifically, this document specifies test methods and test conditions for measuring the durability of a DUT under temperature and humidity conditions and applied voltages. It further applies to evaluations of converse piezoelectric properties in piezoelectric thin films formed primarily on silicon substrates, i.e., piezoelectric thin films used as actuators. This document does not cover reliability assessments, such as methods of predicting the lifetime of a piezoelectric thin film based on a Weibull distribution.