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现行 IEC 62047-29:2017
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Semiconductor devices - Micro-electromechanical devices - Part 29: Electromechanical relaxation test method for freestanding conductive thin-films under room temperature 半导体器件 - 微机电器件 - 第29部分:室温下独立导电薄膜的机电弛豫试验方法
发布日期: 2017-11-22
IEC 62047-29:2017(E)规定了在受控应变和室温下测量微机电系统(MEMS)用独立导电薄膜机电性能的松弛试验方法。独立式导电材料薄膜广泛应用于MEMS、光电子和柔性/可穿戴电子产品中。产品中的独立薄膜承受外部和内部应力,即使在室温下操作一段时间,这些应力也会松弛,这种松弛会导致时间延长- 产品电气性能的依赖性变化。本试验方法适用于各向同性、均质和线性粘弹性材料。
IEC 62047-29:2017(E) specifies a relaxation test method for measuring electromechanical properties of freestanding conductive thin films for micro-electromechanical systems (MEMS) under controlled strain and room temperature. Freestanding thin films of conductive materials are extensively utilized in MEMS, opto-electronics, and flexible/wearable electronics products. Freestanding thin films in the products experience external and internal stresses which could be relaxed even under room temperature during a period of operation, and this relaxation leads to time-dependent variation of electrical performances of the products. This test method is valid for isotropic, homogeneous, and linearly viscoelastic materials.
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归口单位: TC 47/SC 47F
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