本文件描述了使用数字成像系统对扫描电子显微镜进行定量和定性SEM测量的方法，通过评估必要的扫描电子显微镜性能参数，在安装仪器后保持性能。性能参数的项目和评估方法由用户自行选择。

This document describes methods to qualify the scanning electron microscope with the digital imaging system for quantitative and qualitative SEM measurements by evaluating essential scanning electron microscope performance parameters to maintain the performance after installation of the instruments. The items and evaluating methods of the performance parameters are selected by users for their own purposes.