本文件规定了一种优化用于一般分析目的的飞行时间二次离子质谱仪（SIMS）质量校准精度的方法。它仅适用于飞行时间仪表，但不限于任何特定的仪表设计。为使用本程序可以优化的一些仪器参数以及适用于校准质量刻度以获得最佳质量精度的通用峰类型提供了指南。

This document specifies a method to optimize the mass calibration accuracy in time-of-flight secondary ion mass spectrometry (SIMS) instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.