规定了一种标准试件，用于保证长度和宽度小于1 mm、厚度小于10 m的薄膜材料拉伸测试系统的适当性和准确性，这些材料是微电子机械系统（MEMS）、微机械和类似设备的主要结构材料。 它基于这样一个概念，即当拉伸强度预先确定的标准试样的测量拉伸强度在指定范围内时，可以保证拉伸试验系统的适当性和准确性。它还规定了试件，以尽量减少试件之间的特性偏差。

Specifies a standard test piece, which is used to guarantee the propriety and accuracy of a tensile testing system for thin film materials with length and width under 1 mm and thickness under 10 m, which are main structural materials for microelectromechanical systems (MEMS), micromachines and similar devices. It is based on such a concept that a tensile testing system can be guaranteed in propriety and accuracy, when the measured tensile strengths of the standard test pieces, whose tensile strength is pre-determined, are within the designated range. It also specifies the test pieces to minimize characteristics deviation among the pieces.