BS EN 62047-17:2015 specifies the method for performing bulge tests on the free-standing
film that is bulged within a window. The specimen is fabricated with micro/nano structural film
materials, including metal, ceramic and polymer films, for MEMS, micromachines and others.The thickness of the film is in the range of 0,1?m to 10?m, and the width of the rectangular
and square membrane window and the diameter of the circular membrane range from 0,5 mm
to 4 mm.The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure
to the testing film specimen with bulging window.Elastic modulus and residual stress for the film materials can be determined with this method.Cross References:IEC 62047-2:2006EN 62047-2:2006All current amendments available at time of purchase are included with the purchase of this document.