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现行 BS EN 62047-17:2015
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Semiconductor devices. Micro-electromechanical devices-Bulge test method for measuring mechanical properties of thin films 半导体器件 微机电设备
发布日期: 2015-07-31
BS EN 62047-17:2015规定了在独立支架上进行膨胀试验的方法 在窗户内鼓起的胶片。试样由微/纳米结构薄膜制成 用于MEMS、微机械等的材料,包括金属、陶瓷和聚合物薄膜。薄膜的厚度在0.1?的范围内?我到10岁了?m、 矩形的宽度 和方形膜窗,圆形膜的直径范围为0.5mm 到4毫米。通过施加均匀分布的压力,在环境温度下进行试验 对于带有凸出窗口的测试薄膜试样。用这种方法可以测定薄膜材料的弹性模量和残余应力。交叉引用:IEC 62047-2:2006EN 62047-2:2006购买本文件时提供的所有现行修订版均包含在购买本文件中。
BS EN 62047-17:2015 specifies the method for performing bulge tests on the free-standing film that is bulged within a window. The specimen is fabricated with micro/nano structural film materials, including metal, ceramic and polymer films, for MEMS, micromachines and others.The thickness of the film is in the range of 0,1?m to 10?m, and the width of the rectangular and square membrane window and the diameter of the circular membrane range from 0,5 mm to 4 mm.The tests are carried out at ambient temperature, by applying a uniformly-distributed pressure to the testing film specimen with bulging window.Elastic modulus and residual stress for the film materials can be determined with this method.Cross References:IEC 62047-2:2006EN 62047-2:2006All current amendments available at time of purchase are included with the purchase of this document.
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发布单位或类别: 英国-英国标准学会
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